Inventor
MINFENG CHEN
Inventor
TW
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices40%
H01LSemiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
A61BDiagnosis5%
G02BOptical elements, systems or apparatus5%
G06TImage data processing or generation, in general5%
G16HHealthcare informatics, i.e. information and communication technology [ict] specially adapted for the handling or processing of medical or healthcare data5%
H10DInorganic electric semiconductor devices5%
PatentTitleYear
12,399,431Semiconductor processing tool and methods of operation202512,265,332Method of manufacturing a semiconductor device202512,235,589Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device202511,709,435Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device202311,320,747Method of manufacturing a semiconductor device and apparatus for manufacturing the semiconductor device202211,307,492Method for forming photomask and photolithography method202211,211,374Photomask design for generating plasmonic effect202111,175,597Pellicle structure for lithography mask202111,138,730Visible cephalometric measurement method, system and computer processing device2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (8)· patent assignee history
2021Patents assigned to FUSSEN TECH CO LTD (1)· patent assignee history
2021–2025Based in TW· patent location history
2021Based in CN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 8 | 2021–2025 |
| FUSSEN TECH CO LTD | 1 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 8 | 2021–2025 |
| CN | 1 | 2021 |