Inventor
YU NUNOSHIGE
Inventor
JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H01LSemiconductor devices27%
H01JElectric discharge tubes or discharge lamps7%
PatentTitleYear
12,009,217Substrate processing method and substrate processing apparatus202411,732,357Substrate processing method and substrate processing apparatus202311,578,408Gas processing apparatus202311,499,225Gas processing apparatus and gas processing method202211,248,293Film-forming apparatus and film-forming method2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2024Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2022–2024Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 5 | 2022–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 5 | 2022–2024 |