Inventor
Jennifer O'Loughlin
Inventor
Portland, OR, US
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1016%
H01JElectric discharge tubes or discharge lamps9%
C30BSingle-crystal growth4%
H01LSemiconductor devices4%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests4%
Y10TTechnical subjects covered by former us classification4%
B05BSpraying apparatus2%
B82YSpecific uses or applications of nanostructures2%
PatentTitleYear
10,323,323Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition20199,631,276'Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition'20179,399,228'Method and apparatus for purging and plasma suppression in a process chamber'20169,028,924'In-situ deposition of film stacks'20158,741,394'In-situ deposition of film stacks'20148,709,551'Smooth silicon-containing films'20148,268,722'Interfacial capping layers for interconnects'20128,217,513'Remote plasma processing of interface surfaces'20128,084,339'Remote plasma processing of interface surfaces'20117,858,510'Interfacial layers for electromigration resistance improvement in damascene interconnects'20107,648,899'Interfacial layers for electromigration resistance improvement in damascene interconnects'20107,223,705'Ambient gas treatment of porous dielectric'20076,713,873'Adhesion between dielectric materials'20046,645,877'Method of operating a processing chamber having multiple stations'20036,479,028'Rapid synthesis of carbon nanotubes and carbon encapsulated metal nanoparticles by a displacement reaction'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2019Based in Portland, OR, US· patent location history
2010–2016Patents assigned to NOVELLUS SYSTEMS INC (9)· patent assignee history
2011–2014Patents assigned to ANTONELLI GEORGE ANDREW (5)· patent assignee history
2011–2014Patents assigned to O'LOUGHLIN JENNIFER (5)· patent assignee history
2011–2014Patents assigned to VAN SCHRAVENDIJK BART (5)· patent assignee history
2011–2014Patents assigned to SRIRAM MANDYAM (4)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NOVELLUS SYSTEMS INC | 9 | 2010–2016 |
| ANTONELLI GEORGE ANDREW | 5 | 2011–2014 |
| O'LOUGHLIN JENNIFERself | 5 | 2011–2014 |
| VAN SCHRAVENDIJK BART | 5 | 2011–2014 |
| SRIRAM MANDYAM | 4 | 2011–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Portland, OR, US | 15 | 2002–2019 |