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Inventor

Gen Marumoto

Inventor
Kudamatsu, JP

Overview

3→
Patents
1986–1992
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps60%
G01NInvestigating or analysing materials by determining their chemical or physical properties20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
PatentTitleYear
5,118,378'Apparatus for detecting an end point of etching'19924,615,761'Method of and apparatus for detecting an end point of plasma treatment'19864,563,240'Method and apparatus for plasma process'1986

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1986–1992Patents assigned to HITACHI LTD (3)· patent assignee history
1986Patents assigned to HITACHI SANKI ENG CO LTD (1)· patent assignee history
1986–1992Based in Kudamatsu, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI LTD31986–1992
HITACHI SANKI ENG CO LTD11986
Locations
LocationPatentsSpan
Kudamatsu, JP31986–1992