Inventor
Christopher R. Hatem
Inventor
Salisbury, MA, US
Overview
Patents· 31 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H01LSemiconductor devices16%
H01JElectric discharge tubes or discharge lamps14%
H10DInorganic electric semiconductor devices11%
C23CCoating metallic material9%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
B82YSpecific uses or applications of nanostructures2%
H10BElectronic memory devices2%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation2%
H10NElectric solid-state devices not otherwise provided for2%
PatentTitleYear
11,069,511System and methods using an inline surface engineering source202110,879,055Techniques, system and apparatus for selective deposition of a layer using angled ions202010,541,137Method and apparatus for non line-of-sight doping202010,411,096Encapsulated nanostructures and devices containing encapsulated nanostructures20199,985,101Encapsulated nanostructures and method for fabricating20189,953,835Damage free enhancement of dopant diffusion into a substrate20189,589,802'Damage free enhancement of dopant diffusion into a substrate'20179,576,819'Techniques for increased dopant activation in compound semiconductors'20179,553,174'Conversion process utilized for manufacturing advanced 3D features for semiconductor device applications'20179,520,360'Angled ion beam processing of heterogeneous structure'20169,425,027'Methods of affecting material properties and applications therefor'20169,337,040'Angled ion beam processing of heterogeneous structure'20169,240,350'Techniques for forming 3D structures'20169,236,257'Techniques to mitigate straggle damage to sensitive structures'20169,062,367'Plasma processing of workpieces to form a coating'20159,024,273'Method to generate molecular ions from ions with a smaller atomic mass'20158,969,181'Method for epitaxial layer overgrowth'20158,742,373'Method of ionization'20148,697,549'Deposition of porous films for thermoelectric applications'20148,465,909'Self-aligned masking for solar cell manufacture'20138,460,569'Method and system for post-etch treatment of patterned substrate features'20138,461,032'Use of dopants with different diffusivities for solar cell manufacture'20138,372,735'USJ techniques with helium-treated substrates'20138,124,506'USJ techniques with helium-treated substrates'20128,101,528'Low temperature ion implantation'20128,012,843'Optimized halo or pocket cold implants'20118,003,957'Ethane implantation with a dilution gas'20117,807,961'Techniques for ion implantation of molecular ions'20107,655,932'Techniques for providing ion source feed materials'20107,642,150'Techniques for forming shallow junctions'20107,622,722'Ion implantation device with a dual pumping mode and method thereof'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2016Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT (20)· patent assignee history
2009–2010Based in Cambridge, MA, US· patent location history
2010–2016Based in Salisbury, MA, US· patent location history
2012–2016Patents assigned to GODET LUDOVIC (10)· patent assignee history
2012–2016Patents assigned to HATEM CHRISTOPHER R (9)· patent assignee history
2013–2016Patents assigned to HATEM CHRISTOPHER (4)· patent assignee history
2014–2016Based in Hampton, NH, US· patent location history
2016–2021Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (10)· patent assignee history
2016–2021Based in Seabrook, NH, US· patent location history
2017–2019Based in North Billerica, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VARIAN SEMICONDUCTOR EQUIPMENT | 20 | 2009–2016 |
| GODET LUDOVIC | 10 | 2012–2016 |
| VARIAN SEMICONDUCTOR EQUIPMENT ASS INC | 10 | 2016–2021 |
| HATEM CHRISTOPHER Rself | 9 | 2012–2016 |
| HATEM CHRISTOPHERself | 4 | 2013–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Salisbury, Massachusetts, US | 13 | 2010–2016 |
| Seabrook, NH, US | 6 | 2016–2021 |
| Hampton, NH, US | 5 | 2014–2016 |
| North Billerica, Massachusetts, US | 4 | 2017–2019 |
| Cambridge, Massachusetts, US | 3 | 2009–2010 |