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Inventor

TOSHIKATSU TOBANA

Inventor
JP

Overview

3→
Patents
2022–2023
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps25%
H01LSemiconductor devices17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
B08BCleaning in general8%
C23CCoating metallic material8%
H05HPlasma technique8%
H10DInorganic electric semiconductor devices8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
PatentTitleYear
11,594,398Apparatus and method for plasma processing202311,569,094Etching method and plasma processing apparatus202311,251,048Plasma processing method and plasma processing apparatus2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2023Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2022–2023Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32022–2023
Locations
LocationPatentsSpan
JP32022–2023