Inventor
Stephen E. Bernacki
Inventor
Worcester, MA, US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Wprimary
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1030%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
H10DInorganic electric semiconductor devices20%
G11CStatic stores10%
H01JElectric discharge tubes or discharge lamps10%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1010%
PatentTitleYear
5,926,412'Ferroelectric memory structure'19994,436,584'Anisotropic plasma etching of semiconductors'19844,283,235'Dielectric isolation using shallow oxide and polycrystalline silicon utilizing selective oxidation'19814,231,819'Dielectric isolation method using shallow oxide and polycrystalline silicon utilizing a preliminary etching step'19804,184,172'Dielectric isolation using shallow oxide and polycrystalline silicon'19804,119,855'Non vacuum soft x-ray lithographic source'19783,974,382'Lithographic mask attraction system'1976Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1976–1981Patents assigned to MASSACHUSETTS INST TECHNOLOGY (5)· patent assignee history
1976–1981Based in Worcester, MA, US· patent location history
1984Patents assigned to SPERRY CORP (1)· patent assignee history
1984–1999Based in Northboro, MA, US· patent location history
1999Patents assigned to RAYTHEON CO (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MASSACHUSETTS INST TECHNOLOGY | 5 | 1976–1981 |
| RAYTHEON CO | 1 | 1999 |
| SPERRY CORP | 1 | 1984 |
Locations
| Location | Patents | Span |
|---|---|---|
| Worcester, Massachusetts, US | 5 | 1976–1981 |
| Northboro, Massachusetts, US | 2 | 1984–1999 |