Inventor
Seong-yong Moon
Inventor
Kyungki-do, KR
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices57%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
H01JElectric discharge tubes or discharge lamps14%
G01BMeasuring length, thickness or similar linear dimensions7%
PatentTitleYear
9,229,327'Electron beam exposure apparatus and method of detecting error using the same'20167,560,198'Photo-mask having exposure blocking region and methods of designing and fabricating the same'20097,369,254'System and method for measuring dimension of patterns formed on photomask'20086,566,275'Spinner apparatus with chemical supply nozzle and methods of forming patterns and performing etching using the same'20036,296,975'Photo mask of semiconductor device and method for manufacturing the same'20015,853,921'Methods of fabricating phase shift masks by controlling exposure doses'19985,804,338'Photolithography masks including phase-shifting layers and related methods and structures'19985,741,613'Methods of forming half-tone phase-shift masks with reduced susceptiblity to parasitic sputtering'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2016Patents assigned to SAMSUNG ELECTRONICS CO LTD (8)· patent assignee history
1998–2001Based in Kyungki-do, KR· patent location history
2003Based in Suwon-si, KR· patent location history
2008–2016Based in Yongin-si, KR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SAMSUNG ELECTRONICS CO LTD | 8 | 1998–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kyungki-do, KR | 4 | 1998–2001 |
| Yongin-si, KR | 3 | 2008–2016 |
| Suwon-si, KR | 1 | 2003 |