Inventor
THEODORUS WILHELMUS POLET
Inventor
NL
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices62%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H01LSemiconductor devices10%
G01NInvestigating or analysing materials by determining their chemical or physical properties5%
PatentTitleYear
12,566,382Fluid handling system, method and lithographic apparatus202612,242,200Lithography apparatus and a method of manufacturing a device202512,072,636Fluid handling system and lithographic apparatus202411,860,546Fluid handling structure for lithographic apparatus202411,809,086Fluid handling structure, a lithographic apparatus, a method of using a fluid handling structure and a method of using a lithographic apparatus202311,774,857Lithography apparatus and device manufacturing method202311,720,032Process tool and an inspection method202311,614,689Fluid handling structure and lithographic apparatus202311,454,892Fluid handling structure for lithographic apparatus202211,372,336Lithography apparatus and device manufacturing method202211,231,653Fluid handling structure and lithographic apparatus202211,156,921Fluid handling structure, lithographic apparatus, and method of using a fluid handling structure202111,143,969Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2026Patents assigned to ASML NETHERLANDS BV (13)· patent assignee history
2021–2026Based in NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 13 | 2021–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 13 | 2021–2026 |