Inventor
Sathya Swaroop GANTA
Inventor
US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps50%
C23CCoating metallic material30%
H01LSemiconductor devices10%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1010%
PatentTitleYear
12,460,298Showerhead design to control stray deposition202512,033,835Modular microwave source with multiple metal housings202412,020,965Magnetic holding structures for plasma processing applications202411,984,302Magnetic-material shield around plasma chambers near pedestal202411,959,174Shunt door for magnets in plasma process chamber2024Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2024–2025Patents assigned to APPLIED MATERIALS INC (5)· patent assignee history
2024–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 5 | 2024–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 5 | 2024–2025 |