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Inventor

Mitchell BROOKS

Inventor
US

Overview

1→
Patents
2021
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
11,211,253Atomic layer deposition and etch in a single plasma chamber for critical dimension control2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021Patents assigned to LAM RES CORP (1)· patent assignee history
2021Patents assigned to LAM RES CORPORTATION (1)· patent assignee history
2021Based in US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LAM RES CORP12021
LAM RES CORPORTATION12021
Locations
LocationPatentsSpan
US12021