Inventor
Lukasz J. Hupka
Inventor
Croton-on-Hudson, NY, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1045%
H10DInorganic electric semiconductor devices36%
B08BCleaning in general9%
C11DDetergent compositions9%
PatentTitleYear
8,524,606'Chemical mechanical planarization with overburden mask'20138,513,127'Chemical mechanical planarization processes for fabrication of FinFET devices'20138,507,383'Fabrication of replacement metal gate devices'20138,497,210'Shallow trench isolation chemical mechanical planarization'20138,252,119'Microelectronic substrate cleaning systems with polyelectrolyte and associated methods'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012Based in Salt Lake City, UT, US· patent location history
2013Patents assigned to CHARNS LESLIE (4)· patent assignee history
2013Patents assigned to CUMMINGS JASON E (4)· patent assignee history
2013Patents assigned to HUPKA LUKASZ J (4)· patent assignee history
2013Patents assigned to IBM (4)· patent assignee history
2013Patents assigned to KOLI DINESH R (4)· patent assignee history
2013Based in Croton-on-Hudson, NY, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CHARNS LESLIE | 4 | 2013 |
| CUMMINGS JASON E | 4 | 2013 |
| HUPKA LUKASZ Jself | 4 | 2013 |
| IBM | 4 | 2013 |
| KOLI DINESH R | 4 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Croton-on-Hudson, New York, US | 4 | 2013 |
| Salt Lake City, UT, US | 1 | 2012 |