Inventor
Shigeru Kawamura
Inventor
Nirasaki, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
G01NInvestigating or analysing materials by determining their chemical or physical properties13%
H01JElectric discharge tubes or discharge lamps13%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1013%
C23CCoating metallic material7%
G01RMeasuring electric variables7%
H01LSemiconductor devices7%
H03FAmplifiers7%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests7%
PatentTitleYear
8,945,412'Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus'20158,647,440'Substrate processing method and substrate processing apparatus'20147,923,680'Analysis method and analysis apparatus'20116,800,546'Film forming method by radiating a plasma on a surface of a low dielectric constant film'20046,528,108'Method and apparatus for observing porous amorphous film, and method and apparatus for forming the same'20036,407,404'Apparatus for the examining defect of monolithic substrate and method for examining the same'20024,481,483'Low distortion amplifier circuit'1984Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1984Patents assigned to CLARION CO LTD (1)· patent assignee history
1984Based in Tokyo, JP· patent location history
2002Patents assigned to DENSO CORP (1)· patent assignee history
2002Based in Kariya, JP· patent location history
2003–2015Patents assigned to TOKYO ELECTRON LTD (5)· patent assignee history
2003Based in Yamanashi, JP· patent location history
2004–2015Based in Nirasaki, JP· patent location history
2014–2015Patents assigned to HAYASHI TERUYUKI (2)· patent assignee history
2014–2015Patents assigned to KAWAMURA SHIGERU (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 5 | 2003–2015 |
| HAYASHI TERUYUKI | 2 | 2014–2015 |
| KAWAMURA SHIGERUself | 2 | 2014–2015 |
| CLARION CO LTD | 1 | 1984 |
| DENSO CORP | 1 | 2002 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nirasaki, JP | 4 | 2004–2015 |
| Yamanashi, JP | 1 | 2003 |
| Kariya, JP | 1 | 2002 |
| Tokyo, JP | 1 | 1984 |