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Inventor

Michael Nordin

Inventor
San Jose, CA, US

Overview

5→
Patents
2011–2021
Patent span
Electricity
Primary field (CPC H)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1071%
C23CCoating metallic material14%
H01LSemiconductor devices14%
PatentTitleYear
11,024,531Optimized low energy / high productivity deposition system20218,920,162'Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation'20148,273,670'Load lock design for rapid wafer heating'20128,052,419'Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation'20117,960,297'Load lock design for rapid wafer heating'2011

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2011–2014Patents assigned to NOVELLUS SYSTEMS INC (4)· patent assignee history
2011–2021Based in San Jose, CA, US· patent location history
2012–2014Patents assigned to HAMILTON SHAWN (2)· patent assignee history
2012–2014Patents assigned to NORDIN MICHAEL (2)· patent assignee history
2014Patents assigned to GAGE CHRIS (1)· patent assignee history
2021Patents assigned to LAM RES CORP (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NOVELLUS SYSTEMS INC42011–2014
HAMILTON SHAWN22012–2014
NORDIN MICHAELself22012–2014
GAGE CHRIS12014
LAM RES CORP12021
Locations
LocationPatentsSpan
San Jose, California, US52011–2021