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Inventor

Tomoyo Yamaguchi

Inventor
Nirasaki, JP

Overview

4→
Patents
2006–2009
Patent span
Electricity
Primary field (CPC H)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
H01JElectric discharge tubes or discharge lamps30%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1020%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices10%
PatentTitleYear
7,507,673'Method for etching an object to be processed'20097,473,377'Plasma processing method'20097,432,207'Method for etching object to be processed'20087,115,519'Method for plasma treatment'2006

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2006–2009Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2006Based in Goshogawara, JP· patent location history
2008–2009Based in Nirasaki, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD42006–2009
Locations
LocationPatentsSpan
Nirasaki, JP32008–2009
Goshogawara, JP12006