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Inventor

KATSUHITO HIROSE

Inventor
JP

Overview

3→
Patents
2022–2024
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material25%
G05BControl or regulating systems in general17%
H01LSemiconductor devices17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
G05DSystems for controlling or regulating non-electric variables8%
H01JElectric discharge tubes or discharge lamps8%
H05HPlasma technique8%
PatentTitleYear
12,087,562Substrate processing apparatus, substrate processing system, and abnormality detection method202411,873,560Abnormality detection system and control board202411,276,592Processing apparatus and processing method2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2024Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2022–2024Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32022–2024
Locations
LocationPatentsSpan
JP32022–2024