Inventor
Lee-Chuan Tseng
Inventor
New Taipei, TW
Overview
Patents· 34 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B81Cprimary
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems19%
B81BMicrostructural devices or systems, e.g. micromechanical devices18%
H01LSemiconductor devices16%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1011%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1010%
H10DInorganic electric semiconductor devices7%
G01NInvestigating or analysing materials by determining their chemical or physical properties4%
H01JElectric discharge tubes or discharge lamps3%
B01LChemical or physical laboratory apparatus for general use2%
C23CCoating metallic material2%
PatentTitleYear
11,084,715Segmented pedestal for mounting device on chip202110,875,764High efficiency getter design in vacuum MEMS device202010,872,777Self-aligned double patterning (SADP) method202010,870,574Method and apparatus for reducing in-process and in-use stiction for MEMS devices202010,784,091Process and related device for removing by-product on semiconductor processing chamber sidewalls202010,683,204Semiconductor arrangement and formation thereof202010,562,763Fence structure to prevent stiction in a MEMS motion sensor202010,526,199High efficiency getter design in vacuum MEMS device202010,522,429Method of manufacturing semiconductor device201910,483,119Self-aligned double patterning (SADP) method201910,322,930Semiconductor arrangement and formation thereof201910,273,143Method and apparatus for reducing in-process and in-use stiction for MEMS devices201910,269,637Semiconductor structure and fabricating method thereof201910,163,692Structure and formation method of interconnection structure of semiconductor device structure201810,147,829Dielectric sidewall structure for quality improvement in Ge and SiGe devices201810,048,220Biosensor field effect transistor having specific well structure and method of forming the same201810,037,893Method and apparatus for etching wafer with etching gas201810,029,910Formation method of MEMS device structure with cavities20189,975,757Wafer Level Hermetic Seal Process for microelectromechanical systems (MEMS) devices20189,944,516High aspect ratio etch without upper widening20189,878,899'Method and apparatus for reducing in-process and in-use stiction for MEMS devices'20189,796,584'Method for fabricating a micro-well of a biosensor'20179,776,852'Method for controlling surface roughness in MEMS structure'20179,771,256'Micro electro mechanical system (MEMS) device having via extending through plug'20179,714,914'CMOS compatible biofet'20179,637,378'Cup-like getter scheme'20179,606,081'Method for fabricating a micro-well of a biosensor'20179,567,207'Recess with tapered sidewalls for hermetic seal in MEMS devices'20179,567,208'Semiconductor device and method for fabricating the same'20179,466,541'Mechanism for MEMS bump side wall angle improvement'20169,434,076'Robot blade design'20169,293,303'Low contamination chamber for surface activation'20169,224,615'Noble gas bombardment to reduce scallops in bosch etching'20158,940,586'Mechanism for MEMS bump side wall angle improvement'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (32)· patent assignee history
2015–2016Patents assigned to TAIWAN SEMICONDUCTOR MFG (2)· patent assignee history
2015Patents assigned to KUO CHRIS (1)· patent assignee history
2015Patents assigned to TSENG LEE-CHUAN (1)· patent assignee history
2015–2021Based in New Taipei, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 32 | 2015–2021 |
| TAIWAN SEMICONDUCTOR MFG | 2 | 2015–2016 |
| KUO CHRIS | 1 | 2015 |
| TSENG LEE-CHUANself | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| New Taipei, TW | 34 | 2015–2021 |