Inventor
Steve S. Huang
Inventor
Richardson, TX, US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
C23CCoating metallic material8%
G01BMeasuring length, thickness or similar linear dimensions8%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light8%
G01NInvestigating or analysing materials by determining their chemical or physical properties8%
G01RMeasuring electric variables8%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests8%
PatentTitleYear
5,760,573'Plasma density monitor and method'19985,389,153'Plasma processing system using surface wave plasma generating apparatus and method'19955,345,534'Semiconductor wafer heater with infrared lamp module with light blocking means'19945,262,610'Low particulate reliability enhanced remote microwave plasma discharge device'19935,101,764'Method and apparatus for integrating optical sensor into processor'19924,996,077'Distributed ECR remote plasma processing and apparatus'19914,988,644'Method for etching semiconductor materials using a remote plasma generator'1991Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1991–1998Patents assigned to TEXAS INSTRUMENTS INC (6)· patent assignee history
1991–1992Based in Dallas, TX, US· patent location history
1993Patents assigned to US ARMY (1)· patent assignee history
1993–1998Based in Richardson, TX, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TEXAS INSTRUMENTS INC | 6 | 1991–1998 |
| US ARMY | 1 | 1993 |
Locations
| Location | Patents | Span |
|---|---|---|
| Richardson, Texas, US | 4 | 1993–1998 |
| Dallas, Texas, US | 3 | 1991–1992 |