Inventor
Jeffrey T. Fanton
Inventor
Los Altos, CA, US
Overview
Patents· 27 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties41%
G01BMeasuring length, thickness or similar linear dimensions19%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light17%
H01LSemiconductor devices7%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h107%
G21KHandling of particles or ionising radiation not otherwise provided for3%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling2%
H01JElectric discharge tubes or discharge lamps2%
Y10TTechnical subjects covered by former us classification2%
PatentTitleYear
10,859,519Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS)202010,746,530Optical metrology device for measuring samples having thin or thick films202010,481,112Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)201910,119,925Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)20189,588,066'Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)'20179,297,771'Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy'20169,240,254'System and method for characterizing a film by X-ray photoelectron and low-energy X-ray fluorescence spectroscopy'20167,619,741'Modulated reflectance measurement system with multiple wavelengths'20097,423,757'Modulated reflectance measurement system with multiple wavelengths'20087,227,637'Measurement system with separate optimized beam paths'20077,116,424'Modulated reflectance measurement system with multiple wavelengths'20067,106,446'Modulated reflectance measurement system with multiple wavelengths'20067,079,249'Modulated reflectance measurement system with fiber laser technology'20067,061,614'Measurement system with separate optimized beam paths'20067,054,006'Self-calibrating beam profile ellipsometer'20066,934,025'Thin film optical measurement system and method with calibrating ellipsometer'20056,885,019'Sample positioning system to improve edge measurements'20056,753,962'Thin film optical measurement system and method with calibrating ellipsometer'20046,744,850'X-ray reflectance measurement system with adjustable resolution'20046,707,056'Stage rotation system to improve edge measurements'20046,515,746'Thin film optical measurement system and method with calibrating ellipsometer'20036,411,385'Thin film optical measurement system and method with calibrating ellipsometer'20026,304,326'Thin film optical measurement system and method with calibrating ellipsometer'20015,900,939'Thin film optical measurement system and method with calibrating ellipsometer'19995,798,837'Thin film optical measurement system and method with calibrating ellipsometer'19985,596,411'Integrated spectroscopic ellipsometer'19975,181,080'Method and apparatus for evaluating the thickness of thin films'1993Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1993–2007Patents assigned to THERMA WAVE INC (18)· patent assignee history
1993–2020Based in Los Altos, CA, US· patent location history
2016–2017Patents assigned to REED DAVID A (3)· patent assignee history
2016–2017Patents assigned to SCHUELER BRUNO W (3)· patent assignee history
2016–2017Patents assigned to SMEDT RODNEY (3)· patent assignee history
2018–2020Patents assigned to NOVA MEASURING INSTR INC (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| THERMA WAVE INC | 18 | 1993–2007 |
| NOVA MEASURING INSTR INC | 3 | 2018–2020 |
| REED DAVID A | 3 | 2016–2017 |
| SCHUELER BRUNO W | 3 | 2016–2017 |
| SMEDT RODNEY | 3 | 2016–2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Los Altos, California, US | 27 | 1993–2020 |