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Inventor

Florian Ahles

Inventor
Aalen, DE

Overview

3→
Patents
2018–2020
Patent span
Physics
Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices60%
G02BOptical elements, systems or apparatus40%
PatentTitleYear
10,761,436Optical arrangement, in particular lithography system, with a transport lock202010,551,747Device for changing a surface shape of an optical element via electron irradiation20209,939,730Optical assembly2018

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2018–2020Patents assigned to ZEISS CARL SMT GMBH (3)· patent assignee history
2018–2020Based in Aalen, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ZEISS CARL SMT GMBH32018–2020
Locations
LocationPatentsSpan
Aalen, DE32018–2020