Inventor
Shao-Wen Chang
Inventor
Taipei, TW
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps100%
PatentTitleYear
10,115,563Electron-beam lithography method and system2018Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2018Patents assigned to UNIV NAT TAIWAN (1)· patent assignee history
2018Based in Taipei, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| UNIV NAT TAIWAN | 1 | 2018 |
Locations
| Location | Patents | Span |
|---|---|---|
| Taipei, TW | 1 | 2018 |