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Inventor

Nobuhiro Iwama

Inventor
Nirasaki, JP

Overview

3→
Patents
2009–2012
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps67%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
8,251,011'Plasma processing apparatus'20127,709,397'Method and system for etching a high-k dielectric material'20107,527,016'Plasma processing apparatus'2009

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2009–2012Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2009–2012Based in Nirasaki, JP· patent location history
2010Based in Lexington, MA, US· patent location history
2012Patents assigned to HIGASHIURA TSUTOMU (1)· patent assignee history
2012Patents assigned to HIGUCHI FUMIHIKO (1)· patent assignee history
2012Patents assigned to IWAMA NOBUHIRO (1)· patent assignee history
2012Patents assigned to IWATA MANABU (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32009–2012
HIGASHIURA TSUTOMU12012
HIGUCHI FUMIHIKO12012
IWAMA NOBUHIROself12012
IWATA MANABU12012
Locations
LocationPatentsSpan
Nirasaki, JP22009–2012
Lexington, Massachusetts, US12010