Inventor
Barton Lane
Inventor
Austin, TX, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B21Jprimary
B21JForging14%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling14%
H01JElectric discharge tubes or discharge lamps14%
H01LSemiconductor devices14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
Y10TTechnical subjects covered by former us classification14%
C23CCoating metallic material7%
H05HPlasma technique7%
PatentTitleYear
11,043,362Plasma processing apparatuses including multiple electron sources202111,037,765Resonant structure for electron cyclotron resonant (ECR) plasma ionization202111,037,798Self-limiting cyclic etch method for carbon-based films20216,135,933'Automatic tool changing machine'20006,106,446'Automatic tool changing machine'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000Patents assigned to HAEGER INC (2)· patent assignee history
2000Based in Ripon, CA, US· patent location history
2021Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2021Based in Austin, TX, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 3 | 2021 |
| HAEGER INC | 2 | 2000 |
Locations
| Location | Patents | Span |
|---|---|---|
| Austin, Texas, US | 3 | 2021 |
| Ripon, California, US | 2 | 2000 |