Inventor
Edward T. Smith
Inventor
Somerville, MA, US
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
PatentTitleYear
5,484,672'Method of making a rim-type phase-shift mask'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996Patents assigned to IBM (1)· patent assignee history
1996Based in Somerville, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| IBM | 1 | 1996 |
Locations
| Location | Patents | Span |
|---|---|---|
| Somerville, Massachusetts, US | 1 | 1996 |