LexDanaLexDanabeta
Inventor

Toshikazu AKIMOTO

Inventor
JP

Overview

1→
Patents
2025
Patent span
Performing operations
Primary field (CPC B)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B05Cprimary
B05CApparatus for applying fluent materials to surfaces, in general50%
C23CCoating metallic material50%
PatentTitleYear
12,486,575Apparatus for processing substrate, gas shower head, and method for processing substrate2025

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2025Patents assigned to TOKYO ELECTRON LTD (1)· patent assignee history
2025Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD12025
Locations
LocationPatentsSpan
JP12025