Inventor
Asagi MATSUGU
Inventor
JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing35%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
H01LSemiconductor devices10%
B08BCleaning in general5%
B23PMetal-working not otherwise provided for5%
B25BTools or bench devices not otherwise provided for, for fastening, connecting, disengaging, or holding5%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors5%
Y10TTechnical subjects covered by former us classification5%
PatentTitleYear
12,403,507Transfer apparatus, cleaning module, and substrate processing apparatus202512,237,194Substrate transporter and substrate processing apparatus including substrate transporter202511,911,868Substrate processing apparatus, substrate processing method, and storage medium that stores program to cause computer in substrate processing apparatus to execute substrate processing method202411,890,716Polishing unit, substrate processing apparatus, and polishing method202411,638,980Laminated membrane, substrate holder including laminated membrane, and substrate processing apparatus202311,400,561Top ring for holding a substrate and substrate processing apparatus202211,305,399Jig for a polishing apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to EBARA CORP (7)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EBARA CORP | 7 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 7 | 2022–2025 |