LexDanaLexDanabeta
Inventor

Jong-I Mou

Inventor
Hsinchu County, TW

Overview

54→
Patents
2010–2018
Patent span
Electricity
Primary field (CPC H)

Patents· 54 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
G05BControl or regulating systems in general15%
H01LSemiconductor devices13%
Y02PClimate change mitigation technologies in the production or processing of goods13%
H01JElectric discharge tubes or discharge lamps5%
C23CCoating metallic material4%
G06FElectric digital data processing4%
G01RMeasuring electric variables3%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices3%
G06QInformation and communication technology [ict] specially adapted for administrative, commercial, financial, managerial or supervisory purposes3%
PatentTitleYear
10,161,965Method of test probe alignment control201810,113,233Multi-zone temperature control for semiconductor wafer201810,096,482Apparatus and method for chemical mechanical polishing process control201810,047,439Method and system for tool condition monitoring based on a simulated inline measurement20189,997,420Method and/or system for chemical mechanical planarization (CMP)20189,870,896'System and method for controlling ion implanter'20189,727,049'Qualitative fault detection and classification system for tool condition monitoring and associated methods'20179,698,065'Real-time calibration for wafer processing chamber lamp modules'20179,519,285'Systems and associated methods for tuning processing tools'20169,477,219'Dynamic compensation in advanced process control'20169,466,101'Detection of defects on wafer during semiconductor fabrication'20169,442,392'Scanner overlay correction system and method'20169,349,660'Integrated circuit manufacturing tool condition monitoring system and method'20169,323,244'Semiconductor fabrication component retuning'20169,250,619'Systems and methods of automatic boundary control for semiconductor processes'20169,165,843'Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processes'20159,158,867'2D/3D analysis for abnormal tools and stages diagnosis'20159,158,301'Semiconductor processing dispatch control'20159,159,597'Real-time calibration for wafer processing chamber lamp modules'20159,141,097'Adaptive and automatic determination of system parameters'20159,123,583'Overlay abnormality gating by Z data'20159,102,033'Apparatus and method for target thickness and surface profile uniformity control of multi-head chemical mechanical polishing process'20159,082,661'Scanner overlay correction system and method'20159,026,239'APC model extension using existing APC models'20159,023,664'Multi-zone temperature control for semiconductor wafer'20159,000,798'Method of test probe alignment control'20158,938,698'Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processes'20158,925,479'System and method of dosage profile control'20158,889,434'Scanner overlay correction system and method'20148,793,638'Method of optimizing design for manufacturing (DFM)'20148,781,614'Semiconductor processing dispatch control'20148,685,759'E-chuck with automated clamped force adjustment and calibration'20148,627,251'Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processes'20148,606,387'Adaptive and automatic determination of system parameters'20138,549,012'Processing exception handling'20138,452,439'Device performance parmeter tuning method and system'20138,406,904'Two-dimensional multi-products multi-tools advanced process control'20138,404,572'Multi-zone temperature control for semiconductor wafer'20138,406,912'System and method for data mining and feature tracking for fab-wide prediction and control'20138,396,583'Method and system for implementing virtual metrology in semiconductor fabrication'20138,394,719'System and method for implementing multi-resolution advanced process control'20138,392,009'Advanced process control with novel sampling policy'20138,309,444'System and method of dosage profile control'20128,295,965'Semiconductor processing dispatch control'20128,239,056'Advanced process control for new tapeout product'20128,229,588'Method and system for tuning advanced process control parameters'20128,219,341'System and method for implementing wafer acceptance test (“WAT”) advanced process control (“APC”) with routing model'20128,205,173'Physical failure analysis guiding methods'20128,108,060'System and method for implementing a wafer acceptance test (“WAT”) advanced process control (“APC”) with novel sampling policy and architecture'20128,082,055'Method for a bin ratio forecast at new tape out stage'20118,041,451'Method for bin-based control'20117,977,655'Method and system of monitoring E-beam overlay and providing advanced process control'20117,951,615'System and method for implementing multi-resolution advanced process control'20117,851,233'E-chuck for automated clamped force adjustment and calibration'2010

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2010–2016Patents assigned to TAIWAN SEMICONDUCTOR MFG (36)· patent assignee history
2010–2018Based in Hsinchu County, TW· patent location history
2011–2017Patents assigned to MOU JONG-I (29)· patent assignee history
2011–2018Patents assigned to WU SUNNY (12)· patent assignee history
2012–2018Patents assigned to WANG JO FEI (16)· patent assignee history
2012–2018Based in Jhudong Township, TW· patent location history
2014–2018Based in Hsinchu, TW· patent location history
2015–2018Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (18)· patent assignee history
2015Based in Chu-Dong Township, TW· patent location history
2017Based in Hsin-Pu Zhen, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG362010–2016
MOU JONG-Iself292011–2017
TAIWAN SEMICONDUCTOR MFG CO LTD182015–2018
WANG JO FEI162012–2018
WU SUNNY122011–2018
Locations
LocationPatentsSpan
Hsinchu County, TW252010–2018
Jhudong Township, TW152012–2018
Hsinchu, TW122014–2018
Hsin-Pu Zhen, TW12017
Chu-Dong Township, TW12015