Inventor
Yukinori SAKIYAMA
Inventor
US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps27%
H01LSemiconductor devices23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
C23CCoating metallic material15%
B05CApparatus for applying fluent materials to surfaces, in general4%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light4%
H05HPlasma technique4%
PatentTitleYear
12,581,875Processing tool capable for forming carbon layers on substrates202612,340,992Detection and location of anomalous plasma events in fabrication chambers202512,322,582Anomalous plasma event detection and mitigation in semiconductor processing202511,823,928Control of wafer bow in multiple stations202311,443,975Planar substrate edge contact with open volume equalization pathways and side containment202211,393,729Systems and methods for controlling plasma instability in semiconductor fabrication202211,183,406Control of wafer bow in multiple stations2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2026Patents assigned to LAM RES CORP (7)· patent assignee history
2021–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 7 | 2021–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 7 | 2021–2026 |