Inventor
Erik Johan Koop
Inventor
Eindhoven, NL
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices46%
G01NInvestigating or analysing materials by determining their chemical or physical properties15%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them15%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
G01BMeasuring length, thickness or similar linear dimensions8%
PatentTitleYear
11,099,489Method of measuring a parameter of a lithographic process, metrology apparatus202110,558,130Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method202010,474,043Method of measuring a property of a substrate, inspection apparatus, lithographic system and device manufacturing method201910,274,849Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method20199,488,465'Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus'20168,208,118'Method for determining exposure settings, lithographic exposure apparatus, computer program and data carrier'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012–2021Patents assigned to ASML NETHERLANDS BV (6)· patent assignee history
2012Patents assigned to BRINKHOF RALPH (1)· patent assignee history
2012Patents assigned to BURRY DAVID WARREN (1)· patent assignee history
2012Patents assigned to FRANKEN ROBERT (1)· patent assignee history
2012–2021Based in Eindhoven, NL· patent location history
2020Patents assigned to ASNL NETHERLANDS B V (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 6 | 2012–2021 |
| ASNL NETHERLANDS B V | 1 | 2020 |
| BRINKHOF RALPH | 1 | 2012 |
| BURRY DAVID WARREN | 1 | 2012 |
| FRANKEN ROBERT | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 6 | 2012–2021 |