Inventor
Arpit Yati
Inventor
Lucknow, IN
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
H01JElectric discharge tubes or discharge lamps15%
H01LSemiconductor devices15%
G06TImage data processing or generation, in general12%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
G06FElectric digital data processing6%
G06KGraphical data reading6%
G06NComputing arrangements based on specific computational models6%
G06VImage or video recognition or understanding6%
G01BMeasuring length, thickness or similar linear dimensions3%
PatentTitleYear
11,094,053Deep learning based adaptive regions of interest for critical dimension measurements of semiconductor substrates202111,035,666Inspection-guided critical site selection for critical dimension measurement202110,970,834Defect discovery using electron beam inspection and deep learning with real-time intelligence to reduce nuisance202110,957,608Guided scanning electron microscopy metrology based on wafer topography202110,692,690Care areas for improved electron beam defect detection202010,204,416Automatic deskew using design files or inspection images20199,947,596Range-based real-time scanning electron microscope non-visual binner20189,940,704Pre-layer defect site review using design2018Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2018–2021Patents assigned to KLA TENCOR CORP (8)· patent assignee history
2018Patents assigned to KLA—TENCOR CORP (1)· patent assignee history
2018–2021Based in Lucknow, IN· patent location history
2020Based in Uttar Pradesh, IN· patent location history
2021Patents assigned to KLA CORP (1)· patent assignee history
2021Based in Chennai, IN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 8 | 2018–2021 |
| KLA CORP | 1 | 2021 |
| KLA—TENCOR CORP | 1 | 2018 |
Locations
| Location | Patents | Span |
|---|---|---|
| Lucknow, IN | 6 | 2018–2021 |
| Chennai, IN | 1 | 2021 |
| Uttar Pradesh, IN | 1 | 2020 |