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Inventor

Joerg Tschischgale

Inventor
Dresden, DE

Overview

2→
Patents
2008
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Bprimary
G03BApparatus or arrangements for taking photographs or for projecting or viewing them50%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
PatentTitleYear
7,443,484'Method for exposing a semiconductor wafer by applying periodic movement to a component'20087,423,765'Optical system of a microlithographic projection exposure apparatus'2008

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2008Patents assigned to INFINEON TECHNOLOGIES AG (1)· patent assignee history
2008Patents assigned to ZEISS CARL SMT AG (1)· patent assignee history
2008Based in Dresden, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
INFINEON TECHNOLOGIES AG12008
ZEISS CARL SMT AG12008
Locations
LocationPatentsSpan
Dresden, DE22008