Inventor
Daan Maurits Slotboom
Inventor
Wolphaartsdijk, NL
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
10,908,512Methods of controlling a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus202110,719,011Method and apparatus to correct for patterning process error202010,444,632Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate201910,254,658Metrology method, target and substrate201910,095,131Alignment modeling and a lithographic apparatus and exposure method using the same201810,025,193Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product20189,989,858Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate20189,971,251Lithography system and a machine learning controller for such a lithography system20189,507,279'Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2021Patents assigned to ASML NETHERLANDS BV (9)· patent assignee history
2016Based in Rhenen, NL· patent location history
2018–2021Based in Wolphaartsdijk, NL· patent location history
2018Based in Veldhoven, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 9 | 2016–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Wolphaartsdijk, NL | 7 | 2018–2021 |
| Veldhoven, NL | 1 | 2018 |
| Rhenen, NL | 1 | 2016 |