Inventor
Scot T. Smith
Inventor
Winter Springs, FL, US
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices37%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light37%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light16%
G01DMeasuring not specially adapted for a specific variable5%
G02BOptical elements, systems or apparatus5%
PatentTitleYear
8,598,559'Systems and methods for beam splitting for imaging'20137,567,607'Very narrow band, two chamber, high rep-rate gas discharge laser system'20097,369,597'Laser output light pulse stretcher'20087,218,661'Line selected F2 two chamber laser system'20077,061,961'Very narrow band, two chamber, high rep-rate gas discharge laser system'20067,016,388'Laser lithography light source with beam delivery'20066,928,093'Long delay and high TIS pulse stretcher'20056,693,939'Laser lithography light source with beam delivery'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2009Patents assigned to CYMER INC (7)· patent assignee history
2004–2007Based in San Diego, CA, US· patent location history
2006–2013Based in Winter Springs, FL, US· patent location history
2013Patents assigned to BLUME KIMBERLY M (1)· patent assignee history
2013Patents assigned to NORTHROP GRUMMAN SYSTEMS CORP (1)· patent assignee history
2013Patents assigned to SMITH SCOT T (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CYMER INC | 7 | 2004–2009 |
| BLUME KIMBERLY M | 1 | 2013 |
| NORTHROP GRUMMAN SYSTEMS CORP | 1 | 2013 |
| SMITH SCOT Tself | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Winter Springs, Florida, US | 4 | 2006–2013 |
| San Diego, California, US | 4 | 2004–2007 |