Inventor
Andrew J. Nagengast
Inventor
Sunnyvale, CA, US
Overview
Patents· 35 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing34%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
Y10TTechnical subjects covered by former us classification7%
H01LSemiconductor devices6%
B29CShaping or joining of plastics5%
B29KIndexing scheme associated with subclasses b29b, b29c or b29d, relating to moulding materials or to materials for moulds, reinforcements, fillers or preformed parts, e.g. inserts5%
B29LIndexing scheme associated with subclass b29c, relating to particular articles5%
B24DTools for grinding, buffing or sharpening2%
B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form2%
B25BTools or bench devices not otherwise provided for, for fastening, connecting, disengaging, or holding1%
PatentTitleYear
11,056,350Retaining ring having inner surfaces with facets202110,702,971Textured membrane for a multi-chamber carrier head202010,500,695Retaining ring having inner surfaces with features201910,322,492Retaining ring for CMP20199,610,672'Configurable pressure design for multizone chemical mechanical planarization polishing head'20179,452,505'Textured membrane for a multi-chamber carrier head'20169,368,371'Retaining ring having inner surfaces with facets'20169,214,375'End effector having multiple-position contact points'20158,808,062'Multi-chamber carrier head with a textured membrane'20148,545,660'Bonding apparatus and method'20138,535,121'Retaining ring and articles for carrier head'20138,469,776'Flexible membrane for carrier head'20138,454,413'Multi-chamber carrier head with a textured membrane'20138,376,813'Retaining ring and articles for carrier head'20138,360,409'Apparatus and method for simultaneous treatment of multiple workpieces'20138,334,191'Two-chamber system and method for serial bonding and exfoliation of multiple workpieces'20128,207,047'Apparatus and method for simultaneous treatment of multiple workpieces'20128,151,852'Bonding apparatus and method'20128,021,215'Carrier head with retaining ring and carrier ring'20117,950,985'Flexible membrane for carrier head'20117,901,273'Carrier ring for carrier head'20117,727,055'Flexible membrane for carrier head'20107,699,688'Carrier ring for carrier head'20107,654,888'Carrier head with retaining ring and carrier ring'20107,575,504'Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly'20097,527,271'Fast substrate loading on polishing head without membrane inflation step'20097,255,637'Carrier head vibration damping'20076,739,958'Carrier head with a vibration reduction feature for a chemical mechanical polishing system'20046,592,439'Platen for retaining polishing material'20036,425,812'Polishing head for chemical mechanical polishing using linear planarization technology'20026,328,637'Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization'20016,325,706'Use of zeta potential during chemical mechanical polishing for end point detection'20016,186,865'Apparatus and method for performing end point detection on a linear planarization tool'20016,132,289'Apparatus and method for film thickness measurement integrated into a wafer load/unload unit'20006,086,460'Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2015Patents assigned to LAM RES CORP (7)· patent assignee history
2000–2021Based in Sunnyvale, CA, US· patent location history
2003–2021Patents assigned to APPLIED MATERIALS INC (23)· patent assignee history
2012–2015Patents assigned to NAGENGAST ANDREW J (9)· patent assignee history
2012–2013Patents assigned to ZUNIGA STEVEN M (7)· patent assignee history
2012–2013Patents assigned to AQUI DEREK G (5)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 23 | 2003–2021 |
| NAGENGAST ANDREW Jself | 9 | 2012–2015 |
| LAM RES CORP | 7 | 2000–2015 |
| ZUNIGA STEVEN M | 7 | 2012–2013 |
| AQUI DEREK G | 5 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 35 | 2000–2021 |