Inventor
Manjunath SUBBANNA
Inventor
IN
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material46%
C30BSingle-crystal growth31%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry8%
H01LSemiconductor devices8%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h108%
PatentTitleYear
12,584,218Plate assemblies, process kits, and processing chambers for semiconductor manufacturing202612,467,144Methods of correlating zones of processing chambers, and related systems and methods202512,428,731Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability202512,091,749Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet202412,060,651Chamber architecture for epitaxial deposition and advanced epitaxial film applications202412,018,372Gas injector for epitaxy and CVD chamber2024Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2024–2026Patents assigned to APPLIED MATERIALS INC (6)· patent assignee history
2024–2026Based in IN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 6 | 2024–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| IN | 6 | 2024–2026 |