Inventor
Yih-Chen Su
Inventor
Taichung, TW
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices42%
H01LSemiconductor devices17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
H10DInorganic electric semiconductor devices8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests8%
PatentTitleYear
11,048,158Method for extreme ultraviolet lithography mask treatment202111,029,593Lithography mask with a black border regions and method of fabricating the same202111,004,812Package structure and method of forming the same202110,866,504Lithography mask with a black border region and method of fabricating the same20208,916,482'Method of making a lithography mask'20146,962,878'Method to reduce photoresist mask line dimensions'2005Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2005–2014Patents assigned to TAIWAN SEMICONDUCTOR MFG (2)· patent assignee history
2005–2021Based in Taichung, TW· patent location history
2014Patents assigned to CHEN CHIA-JEN (1)· patent assignee history
2014Patents assigned to HSIEH HUNG-CHANG (1)· patent assignee history
2014Patents assigned to LEE HSIN-CHANG (1)· patent assignee history
2020–2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (4)· patent assignee history
2021Based in Hsinchu, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 4 | 2020–2021 |
| TAIWAN SEMICONDUCTOR MFG | 2 | 2005–2014 |
| CHEN CHIA-JEN | 1 | 2014 |
| HSIEH HUNG-CHANG | 1 | 2014 |
| LEE HSIN-CHANG | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Taichung, TW | 5 | 2005–2021 |
| Hsinchu, TW | 1 | 2021 |