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Inventor

Marcus Carbery

Inventor
Clontarf, IE

Overview

3→
Patents
2006–2018
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G05Bprimary
G05BControl or regulating systems in general33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
C23CCoating metallic material11%
H01JElectric discharge tubes or discharge lamps11%
H05HPlasma technique11%
Y02PClimate change mitigation technologies in the production or processing of goods11%
PatentTitleYear
9,864,361'Flexible temperature compensation systems and methods for substrate processing systems'20187,113,842'Method for transferring process control models between plasma processing chambers'20067,062,411'Method for process control of semiconductor manufacturing equipment'2006

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2006Patents assigned to SCIENT SYSTEMS RES LTD (2)· patent assignee history
2006Based in Artane, IE· patent location history
2006Based in Dublin, IE· patent location history
2018Patents assigned to LAM RES CORP (1)· patent assignee history
2018Based in Clontarf, IE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SCIENT SYSTEMS RES LTD22006
LAM RES CORP12018
Locations
LocationPatentsSpan
Clontarf, IE12018
Artane, IE12006
Dublin, IE12006