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Inventor

Stefan Schaff

Inventor
Ellwangen, DE

Overview

3→
Patents
2017–2020
Patent span
Physics
Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
G02BOptical elements, systems or apparatus33%
G21KHandling of particles or ionising radiation not otherwise provided for17%
PatentTitleYear
10,809,636Optical arrangement, in particular lithography system202010,254,466Optical waveguide for guiding illumination light20199,671,548'Optical waveguide for guiding illumination light'2017

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2017–2020Patents assigned to ZEISS CARL SMT GMBH (3)· patent assignee history
2017–2020Based in Ellwangen, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ZEISS CARL SMT GMBH32017–2020
Locations
LocationPatentsSpan
Ellwangen, DE32017–2020