Inventor
Jen Sern Lew
Inventor
Singapore, SG
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices32%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
C23CCoating metallic material12%
B08BCleaning in general8%
F27BFurnaces, kilns, ovens or retorts in general4%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices4%
H01JElectric discharge tubes or discharge lamps4%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
PatentTitleYear
11,111,583Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity202110,978,334Sealing structure for workpiece to substrate bonding in a processing chamber202110,607,870Substrate carrier for active/passive bonding and de-bonding of a substrate202010,549,324Method and apparatus for backside cleaning of substrates20209,993,853Method and apparatus for backside cleaning of substrates20189,845,533Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity20179,818,624'Methods and apparatus for correcting substrate deformity'20179,740,111'Electrostatic carrier for handling substrates for processing'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2021Patents assigned to APPLIED MATERIALS INC (8)· patent assignee history
2017Patents assigned to ELUMALAI KARTHIK (1)· patent assignee history
2017Patents assigned to LEW JEN SERN (1)· patent assignee history
2017Patents assigned to SUNDARRAJAN ARVIND (1)· patent assignee history
2017Patents assigned to THIRUNAVUKARASU SRISKANTHARAJAH (1)· patent assignee history
2017–2021Based in Singapore, SG· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 8 | 2017–2021 |
| ELUMALAI KARTHIK | 1 | 2017 |
| LEW JEN SERNself | 1 | 2017 |
| SUNDARRAJAN ARVIND | 1 | 2017 |
| THIRUNAVUKARASU SRISKANTHARAJAH | 1 | 2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Singapore, SG | 8 | 2017–2021 |