Inventor
PULKIT AGARWAL
Inventor
US
Overview
Patents· 16 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
C23CCoating metallic material23%
H01LSemiconductor devices19%
H01JElectric discharge tubes or discharge lamps13%
G05BControl or regulating systems in general4%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling2%
B25BTools or bench devices not otherwise provided for, for fastening, connecting, disengaging, or holding2%
G06FElectric digital data processing2%
G06NComputing arrangements based on specific computational models2%
G06QInformation and communication technology [ict] specially adapted for administrative, commercial, financial, managerial or supervisory purposes2%
PatentTitleYear
12,531,220Automated feedforward and feedback sequence for patterning CD control202612,473,633Plasma enhanced atomic layer deposition of silicon-containing films202512,451,346Modulated atomic layer deposition202512,322,619Dynamic process control in semiconductor manufacturing202512,308,264Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports202512,209,312Temperature control of a multi-zone pedestal202512,186,851Use of vacuum during transfer of substrates202512,071,689Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes202412,057,300Apparatus for cleaning plasma chambers202412,040,181Modulated atomic layer deposition202411,913,113Method and apparatus for modulating film uniformity202411,651,963Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film202311,542,599Method and apparatus for providing station to station uniformity202311,520,828Methods for representing and storing data in a graph data structure using artificial intelligence202211,322,416Controller for controlling core critical dimension variation using flash trim sequence202211,236,422Multi zone substrate support for ALD film property correction and tunability2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to LAM RES CORP (15)· patent assignee history
2022Patents assigned to IBM (1)· patent assignee history
2022–2026Based in US· patent location history
2022Based in IN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 15 | 2022–2026 |
| IBM | 1 | 2022 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 15 | 2022–2026 |
| IN | 1 | 2022 |