Inventor
Louise Peccoud
Inventor
Claix, FR
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material27%
H01JElectric discharge tubes or discharge lamps27%
C23FNon-mechanical removal of metallic material from surface9%
G01RMeasuring electric variables9%
G11BInformation storage based on relative movement between record carrier and transducer9%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h109%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests9%
PatentTitleYear
5,105,761'Diffusion plasma-assisted chemical treatment apparatus'19925,047,115'Process for etching by gas plasma'19914,990,859'Process and apparatus for determining the impedance of the discharge in a plasma reactor system comprising a tuning box and application to the regulation of the impedance or the ionic current in such reactor'19914,491,496'Enclosure for the treatment, and particularly for the etching of substrates by the reactive plasma method'19854,124,474'Method and apparatus for controlling the deposition of films by reactive sputtering'1978Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1978–1992Patents assigned to COMMISSARIAT ENERGIE ATOMIQUE (5)· patent assignee history
1978–1991Based in Claix, FR· patent location history
1992Based in Daix, FR· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| COMMISSARIAT ENERGIE ATOMIQUE | 5 | 1978–1992 |
Locations
| Location | Patents | Span |
|---|---|---|
| Claix, FR | 4 | 1978–1991 |
| Daix, FR | 1 | 1992 |