Inventor
Koki Tamagawa
Inventor
Nagano, JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1041%
H01LSemiconductor devices11%
H02NElectric machines not otherwise provided for11%
Y10TTechnical subjects covered by former us classification11%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling7%
H01JElectric discharge tubes or discharge lamps7%
C04BLime, magnesia4%
C23CCoating metallic material4%
G01KMeasuring temperature4%
PatentTitleYear
9,837,297Tray and wafer holding apparatus20179,252,039'Electrostatic chuck apparatus'20169,120,704'Dielectric layer for electrostatic chuck and electrostatic chuck'20158,686,743'Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatus'20148,641,825'Substrate temperature regulation fixed apparatus'20148,505,928'Substrate temperature control fixing apparatus'20138,441,772'Substrate for electrostatic chuck and electrostatic chuck'20138,199,454'Electrostatic chuck and substrate temperature adjusting-fixing device'20128,068,326'Electrostatic chuck and substrate temperature control fixing apparatus'20118,023,248'Electrostatic chuck'20115,777,838'Electrostatic chuck and method of attracting wafer'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998Based in Aizuwakamatsu, JP· patent location history
2011–2017Patents assigned to SHINKO ELECTRIC IND CO (10)· patent assignee history
2011–2014Patents assigned to TAMAGAWA KOKI (6)· patent assignee history
2011–2012Patents assigned to KOYAMA TOMOAKI (2)· patent assignee history
2011–2017Based in Nagano, JP· patent location history
2013–2014Patents assigned to YOSHIKAWA TADAYOSHI (3)· patent assignee history
2013–2014Patents assigned to SAITO MIKI (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SHINKO ELECTRIC IND CO | 10 | 2011–2017 |
| TAMAGAWA KOKIself | 6 | 2011–2014 |
| YOSHIKAWA TADAYOSHI | 3 | 2013–2014 |
| KOYAMA TOMOAKI | 2 | 2011–2012 |
| SAITO MIKI | 2 | 2013–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nagano, JP | 10 | 2011–2017 |
| Aizuwakamatsu, JP | 1 | 1998 |