Inventor

Haruhiro (Harry) Goto

Inventor

Saratoga, CA, US

Overview

3→

Patents

1997–1999

Patent span

Electricity

Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%

H10DInorganic electric semiconductor devices18%

H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1018%

Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests18%

H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation9%

Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution9%

PatentTitleYear

5,895,937'Tapered dielectric etch in semiconductor devices'1999 5,728,608'Tapered dielectric etch in semiconductor devices'1998 5,607,602'High-rate dry-etch of indium and tin oxides by hydrogen and halogen radicals such as derived from HCl gas'1997

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1997–1999Patents assigned to APPLIED KOMATSU TECHNOLOGY INC (3)· patent assignee history

1997–1999Based in Saratoga, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
APPLIED KOMATSU TECHNOLOGY INC	3	1997–1999

Locations

Location	Patents	Span
Saratoga, California, US	3	1997–1999