Inventor
THAI CHENG CHUA
Inventor
US
Overview
Patents· 23 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
C23CCoating metallic material14%
H01LSemiconductor devices14%
H05HPlasma technique8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
H05BElectric heating3%
C01BNon-metallic elements1%
C01PIndexing scheme relating to structural and physical aspects of solid inorganic compounds1%
C30BSingle-crystal growth1%
PatentTitleYear
12,590,363Apparatus for single chamber deposition and etch202612,571,092Integrated methods for graphene formation202612,553,129Electrochemical reduction of surface metal oxides202612,518,948Remote modular high-frequency source202612,442,104Nanocrystalline diamond with amorphous interfacial layer202512,438,005Low temperature selective etching of silicon nitride using microwave plasma202512,340,978Symmetric and irregular shaped plasmas using modular microwave sources202512,315,739Isotropic silicon nitride removal202512,300,497Method and apparatus of low temperature plasma enhanced chemical vapor deposition of graphene202512,198,966Substrate support with multiple embedded electrodes202512,191,118Monolithic modular microwave source with integrated process gas distribution202512,144,090Monolithic modular microwave source with integrated temperature control202412,002,654Modular high-frequency source202411,955,331Method of forming silicon nitride films using microwave plasma202411,881,384Monolithic modular microwave source with integrated process gas distribution202411,721,532Modular microwave source with local lorentz force202311,670,489Modular microwave source with embedded ground surface202311,564,292Monolithic modular microwave source with integrated temperature control202311,501,955Modular high-frequency source with integrated gas distribution202211,488,796Thermal break for high-frequency antennae202211,404,248Modular microwave plasma source202211,393,661Remote modular high-frequency source202211,217,443Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to APPLIED MATERIALS INC (23)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 23 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 23 | 2022–2026 |