Inventor
KOEN CUYPERS
Inventor
BE
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
F16KValves10%
G05DSystems for controlling or regulating non-electric variables10%
H01LSemiconductor devices10%
H02NElectric machines not otherwise provided for10%
PatentTitleYear
12,566,382Fluid handling system, method and lithographic apparatus202612,287,570Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus202512,242,200Lithography apparatus and a method of manufacturing a device202511,860,546Fluid handling structure for lithographic apparatus202411,774,857Lithography apparatus and device manufacturing method202311,454,892Fluid handling structure for lithographic apparatus202211,372,336Lithography apparatus and device manufacturing method202211,199,771Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2026Patents assigned to ASML NETHERLANDS BV (8)· patent assignee history
2021–2026Based in BE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 8 | 2021–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| BE | 8 | 2021–2026 |