Inventor
Yuval LAMHOT
Inventor
IL
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
H01LSemiconductor devices19%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1019%
G01BMeasuring length, thickness or similar linear dimensions13%
G01CMeasuring distances, levels or bearings6%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
G06FElectric digital data processing6%
G06TImage data processing or generation, in general6%
PatentTitleYear
11,861,824Reference image grouping in overlay metrology202411,862,522Accuracy improvements in optical metrology202411,454,894Systems and methods for scatterometric single-wavelength measurement of misregistration and amelioration thereof202211,158,548Overlay measurement using multiple wavelengths2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2024Patents assigned to KLA TENCOR CORP (2)· patent assignee history
2021–2024Based in IL· patent location history
2022–2024Patents assigned to KLA CORP (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA CORP | 2 | 2022–2024 |
| KLA TENCOR CORP | 2 | 2021–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| IL | 4 | 2021–2024 |