Inventor
NATHAN MUSSELWHITE
Inventor
US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
H01LSemiconductor devices27%
C11DDetergent compositions7%
C23CCoating metallic material7%
C23FNon-mechanical removal of metallic material from surface7%
H10BElectronic memory devices7%
H10DInorganic electric semiconductor devices7%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
PatentTitleYear
12,568,781Selective silicon trim by thermal etching202612,467,147Vapor cleaning of substrate surfaces202512,080,592Film stack simplification for high aspect ratio patterning and vertical scaling202412,040,193Efficient cleaning and etching of high aspect ratio structures202411,488,831Efficient cleaning and etching of high aspect ratio structures2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to LAM RES CORP (5)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 5 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 5 | 2022–2026 |