Inventor

Joannes Theodoor De Smit

Inventor

Eindhoven, NL

Overview

2005–2020

Patent span

Physics

Primary field (CPC G)

Patents· 46 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary

G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%

PatentTitleYear

10,788,755Lithographic apparatus and device manufacturing method2020 10,678,139Lithographic apparatus and device manufacturing method2020 10,620,545Lithographic apparatus and device manufacturing method2020 10,503,084Lithographic apparatus and device manufacturing method2019 10,261,428Lithographic apparatus and device manufacturing method2019 10,222,706Lithographic apparatus and device manufacturing method2019 10,191,389Lithographic apparatus and device manufacturing method2019 10,180,629Lithographic apparatus and device manufacturing method2019 9,964,858Lithographic apparatus and device manufacturing method2018 9,740,107'Lithographic apparatus and device manufacturing method'2017 9,541,843'Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid'2017 9,482,966'Lithographic apparatus and device manufacturing method'2016 9,366,972'Lithographic apparatus and device manufacturing method'2016 9,195,153'Lithographic apparatus and device manufacturing method'2015 9,152,058'Lithographic apparatus and device manufacturing method involving a member and a fluid opening'2015 9,110,389'Lithographic apparatus and device manufacturing method'2015 9,091,940'Lithographic apparatus and method involving a fluid inlet and a fluid outlet'2015 9,081,299'Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap'2015 9,057,967'Lithographic apparatus and device manufacturing method'2015 8,797,503'Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure'2014 8,558,989'Lithographic apparatus and device manufacturing method'2013 8,482,845'Lithographic apparatus and device manufacturing method'2013 8,472,002'Lithographic apparatus and device manufacturing method'2013 8,363,208'Lithographic apparatus and device manufacturing method'2013 8,344,341'Lithographic apparatus and device manufacturing method'2013 8,208,120'Lithographic apparatus and device manufacturing method'2012 8,169,593'Lithographic apparatus and device manufacturing method'2012 8,154,708'Lithographic apparatus and device manufacturing method'2012 7,982,850'Immersion lithographic apparatus and device manufacturing method with gas supply'2011 7,795,603'Lithographic apparatus and device manufacturing method'2010 7,684,008'Lithographic apparatus and device manufacturing method'2010 7,593,092'Lithographic apparatus and device manufacturing method'2009 7,593,093'Lithographic apparatus and device manufacturing method'2009 7,482,611'Lithographic apparatus and device manufacturing method'2009 7,477,403'Optical position assessment apparatus and method'2009 7,459,247'Lithographic apparatus and device manufacturing method'2008 7,388,648'Lithographic projection apparatus'2008 7,372,541'Lithographic apparatus and device manufacturing method'2008 7,317,504'Lithographic apparatus and device manufacturing method'2008 7,274,029'Lithographic apparatus and device manufacturing method'2007 7,213,963'Lithographic apparatus and device manufacturing method'2007 7,199,858'Lithographic apparatus and device manufacturing method'2007 7,193,232'Lithographic apparatus and device manufacturing method with substrate measurement not through liquid'2007 7,116,404'Lithographic apparatus and device manufacturing method'2006 7,081,943'Lithographic apparatus and device manufacturing method'2006 6,952,253'Lithographic apparatus and device manufacturing method'2005

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2005–2020Patents assigned to ASML NETHERLANDS BV (46)· patent assignee history

2005–2020Based in Eindhoven, NL· patent location history

2012–2017Patents assigned to DE SMIT JOANNES THEODOOR (16)· patent assignee history

2012–2017Patents assigned to LOF JOERI (13)· patent assignee history

2012–2017Patents assigned to LOOPSTRA ERIK ROELOF (13)· patent assignee history

2012–2017Patents assigned to SIMON KLAUS (13)· patent assignee history

2013Based in Waalre, NL· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
ASML NETHERLANDS BV	46	2005–2020
DE SMIT JOANNES THEODOORself	16	2012–2017
LOF JOERI	13	2012–2017
LOOPSTRA ERIK ROELOF	13	2012–2017
SIMON KLAUS	13	2012–2017

Locations

Location	Patents	Span
Eindhoven, NL	45	2005–2020
Waalre, NL	1	2013