Inventor
MADHU SANTOSH KUMAR MUTYALA
Inventor
US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material27%
H01JElectric discharge tubes or discharge lamps24%
H01LSemiconductor devices21%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
H05BElectric heating3%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h103%
PatentTitleYear
12,562,355Isolator for processing chambers202612,412,741Silicon oxide gap fill using capacitively coupled plasmas202512,338,530Shaped showerhead for edge plasma modulation202511,929,278Low impedance current path for edge non-uniformity tuning202411,869,795Mesa height modulation for thickness correction202411,817,313Methods for pressure ramped plasma purge202311,600,468Multi channel splitter spool202311,430,654Initiation modulation for plasma deposition202211,270,903Multi zone electrostatic chuck2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to APPLIED MATERIALS INC (9)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 9 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 9 | 2022–2026 |