Inventor
AJIT BALAKRISHNA
Inventor
US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
G01DMeasuring not specially adapted for a specific variable10%
G01FMeasuring volume, volume flow, mass flow or liquid level10%
G01RMeasuring electric variables10%
G05BControl or regulating systems in general10%
H05HPlasma technique10%
H01LSemiconductor devices5%
PatentTitleYear
12,555,748Symmetric plasma process chamber202611,894,220Method and apparatus for controlling a processing reactor202411,693,053Bode fingerprinting for characterizations and failure detections in processing chamber202311,486,927Bode fingerprinting for characterizations and failure detections in processing chamber202211,315,760Symmetric plasma process chamber2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to APPLIED MATERIALS INC (5)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 5 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 5 | 2022–2026 |